Characterization of an electron beam

ABSTRACT

A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also, a corresponding liquid metal jet X-ray source.

CROSS REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of U.S. application Ser. No.17/777,747, filed on May 18, 2022, which is a U.S. national stage ofInternational Application No. PCT/EP2020/081854, filed on Nov. 12, 2020,which claims the benefit of European Application No. 19209895.2, filedon Nov. 19, 2019. The entire contents of each of U.S. application Ser.No. 17/777,747, International Application No. PCT/EP2020/081854, andEuropean Application No. 19209895.2 are hereby incorporated herein byreference in their entirety.

TECHNICAL FIELD

The invention disclosed herein generally relates to characterization ofan electron beam in a liquid metal jet X-ray source.

BACKGROUND

X-ray radiation may be generated by letting an electron beam impact upona target material. The X-ray radiation may be generated asBremsstrahlung or characteristic line emission from the target material.The performance of the X-ray source depends inter alia on thecharacteristics of the focal spot of the X-ray radiation generated bythe interaction between the electron beam and the target. Generally,there is a strive for higher brilliance and smaller focal spots of theX-ray radiation, which requires improved control of the electron beamand its interaction with the target. In particular, several attemptshave been made to more accurately determine and control the spot sizeand shape of the electron beam impacting the target.

WO 2012/087238 discloses a technique for determining and controlling awidth of an electron beam at its interaction point with the target. Thisprior art technique involves the use of a sensor having acharge-sensitive area. A measurement of the width of the electron beamis carried out by deflecting the electron beam over the sensor areawhile an electron target is present and partially obscures the sensorarea. Because the electron target obscures or partially obscures aportion of the sensor area, the recorded sensor signal will exhibit atransition between minimal attenuation (unobscured sensor area) andmaximal attenuation (behind target) of the beam. The beam width may bederived from this information, in particular from the width of thetransition. For measurement purposes, however, the sensor area cannot beelectrically grounded. This technique therefore entails challenges suchas how to avoid short-circuits and arcing at the sensor edges.

SUMMARY

The present invention provides an improvement to electron beam impactliquid metal jet X-ray sources and is based on the idea ofcharacterizing the electron beam by measuring X-ray radiation generatedby the electron beam. More specifically, the generated X-ray radiationmay be measured while the electron beam is scanned so that an X-rayprofile is obtained. One or more characteristics of the electron beamcan then be calculated based on the obtained X-ray profile.

Hence, in embodiments of the present invention, characteristics of theelectron beam are determined through detection of X-ray radiationgenerated from the electron beam during scanning thereof. Since nomeasurement of electrical current through the portion (“the electrondump”) of the X-ray source where the electron beam impacts after havingtraversed an interaction region is needed, this portion can be connectedto ground (i.e. be electrically grounded). By relying on X-raymeasurements instead of measurements of electrical current, the electronbeam dump does not need to be electrically isolated from itssurroundings, thereby eliminating the risk of short-circuits due to, forexample, deposition of droplets of material from the liquid jet at anedge of the electron dump. Furthermore, image distortions due todeposition of droplets on the electron dump surface may be considerablyreduced since such deposited material will typically either betransparent to X-rays or act as another X-ray source, depending onconfiguration.

One characteristic of the electron beam that is of interest is thecross-sectional extension (the width) thereof. The width, orcross-sectional extension, of the electron beam can suitably be definedas the full width at half maximum (FWHM). This is sometimes referred toas the “spot size” of the beam. The width of the electron beam in theinteraction region, where it impinges on the liquid metal jet target, isan important factor affecting the X-ray generation process. Embodimentsof the present invention can be used for determining the width of theelectron beam in the interaction region either by using the liquid metaljet as an obscuring object over which the electron beam is scanned, orby scanning the electron beam over the interaction region and lettingthe electron beam pass an aperture before being detected. In the lattercase, the width of the electron beam is determined at the aperture andthen the width in the interaction region is determined mathematicallythrough a straight-forward geometrical transformation. Othercharacteristics of the electron beam may, for example, include intensityprofile and alignment.

In some embodiments of the present invention, the liquid metal jet isused as an object obscuring the electron beam from the electron beamdump. The electron beam is scanned between a first position in which theelectron beam impinges on the electron beam dump unobscured by theliquid metal jet, and a second position in which the liquid metal jetobscures the electron beam dump maximally, and a suitable set ofintermediate positions. The X-ray radiation generated by interactionbetween the electron beam and the electron beam dump is measured duringscanning to obtain an X-ray profile that maps scanning positions togenerated X-ray radiation, i.e. the X-ray profile can be regarded as afunction of deflection settings during scanning. A transition betweenunobscured and obscured positions may thus be identified, and the widthof such transition corresponds to the width of the electron beammeasured at the liquid metal jet. As will be appreciated, a widthdetermined in terms of scanning positions can readily be converted intounits of length if the displacement of the electron beam at the liquidmetal jet is known for each scanning position.

In embodiments where the electron beam is scanned over the liquid metaljet, the distance required to move the beam from one side of the jet tothe other may be regarded as a measure of the width of the liquid metaljet itself. Furthermore, a location of the liquid metal jet may beobtained from the positions where the electron beam is obscured by theliquid metal jet. Variation in liquid metal jet width and/or locationmay be considered as indicators for the stability of the process ofgenerating the liquid metal jet.

In some embodiments, the scanning may be performed between a firstposition in which at least half of the electron beam passes on a firstside of the liquid metal jet before impinging on the electron beam dump,and a second position in which at least half of the electron beam passeson a second side of the liquid metal jet before impinging on theelectron beam dump. A width of the electron beam may then be extractedfrom the change in generated X-ray radiation as the electron beam isscanned from the first side to the other. In this way, electron beamwidths that exceed the liquid metal jet width can be measured.

In some embodiments, an obscuring object other than the liquid metal jetis used. Various obscuring objects could be used provided that theyabsorb and/or reflect electrons such that the electrons do not reach theelectron beam dump.

In other embodiments, the X-ray profile is determined not only fromX-ray radiation generated by interaction between the electron beam andthe electron beam dump, but also by interaction between the electronbeam and the liquid metal jet itself. In such embodiments, the electronbeam dump functions primarily as a feature for disposal of charge. TheX-ray radiation generated by interaction between the electron beam andthe liquid metal jet during scanning of the electron beam is measuredusing an X-ray detector. As can be understood, the X-ray detector willbe able to detect X-ray radiation when the electron beam impacts theliquid metal jet but will not detect any X-ray radiation when theelectron beam does not impact the liquid metal jet. At some scanningposition for the electron beam, the generation of X-ray radiation willbe maximum, and similar to what has been described above the width ofthe electron beam can be determined from the relationship betweenscanning position and detected X-ray radiation, i.e. from the X-rayprofile.

In some embodiments, the generated X-ray radiation is passed through apin hole before being detected by the X-ray detector. Such use of a pinhole provides imaging capabilities that can be used for determiningcharacteristics such as cross-sectional extension of the electron beam.

Accordingly, methods and devices as set forth in the independent claimsare provided. The dependent claims define advantageous embodiments ofthe invention.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the disclosed invention will be described in the detaileddescription below, where reference is made to the accompanying drawings,on which:

FIG. 1 is a flow chart illustrating a method according to the presentinvention;

FIG. 2 is a schematic perspective view of a liquid metal jet X-raysource according to some embodiments of the invention;

FIG. 3 schematically shows a first embodiment of a liquid metal jetX-ray source according to the invention;

FIG. 4 schematically shows a second embodiment of a liquid metal jetX-ray source according to the invention;

FIG. 5 schematically shows a third embodiment of a liquid metal jetX-ray source according to the invention; and

FIG. 6 schematically shows a fourth embodiment of a liquid metal jetX-ray source according to the invention.

In the drawings, corresponding features are designated by the samereference numerals throughout.

DETAILED DESCRIPTION

Embodiments of the present invention provide characterization of anelectron beam that is used for generation of X-ray radiation in a liquidmetal jet X-ray source. In order to characterize the electron beam, theelectron beam is scanned over an obscuring object and X-ray radiationgenerated during such scanning is detected. The obscuring object may bean aperture, the liquid metal jet, or some reference object.

From a general perspective, it may be preferred to make measurements atthe focal plane of the electron beam, since the focal plane is typicallywhere the electron beam will interact with the liquid metal jet targetto generate X-rays during operation. However, it is also conceivable tomake measurements at some other plane along the electron beam and thenmathematically transform the results such that they reflect theconditions at the focal plane. In some embodiments, such transformationcan conceivably be established as a part of a factory calibrationprocedure.

In preferred embodiments of the present invention, characterization ofan electron beam is made using an obscuring object along the path of theelectron beam. When the electron beam is scanned over at least part ofthe interaction region, the path of the electron beam will be at leastpartly intersected by the obscuring object for some scanning directionswhile the electron beam is unobscured for other scanning directions.Characteristics of the electron beam, such that the cross-sectional sizeor shape thereof, can thus be obtained based on how much the electronbeam is obstructed for different scanning directions, which in turn isdeduced by measuring X-ray radiation generated during the scanning ofthe electron beam.

The obscuring object may be located at various positions. For example,an aperture may be provided in front of the electron beam dump such thatonly electrons that pass the aperture are detected at said beam dump.This approach is useful in embodiments where the measured X-rayradiation is generated by interaction between the electron beam and theelectron beam dump. Alternatively, or in addition, an obscuring objectmay be placed in the interaction region such that it intersects theelectron beam at or near the location where it will interact with theliquid metal jet during operation of the X-ray source.

In some preferred embodiments, the liquid metal jet itself is used asthe obscuring object, i.e. the edge, over which the electron beam isscanned, and the measured X-ray radiation may then be the radiationgenerated by interaction between the electron beam and the liquid metaljet.

In other embodiments, a reference object is inserted into the beam pathof the electron beam when the measurements are made, and then removedprior to regular operation of the X-ray source. Such reference objectmay provide edges in more than one direction, thus facilitatingmeasurement of, for example, electron beam astigmatism. Measurementsperformed using a reference object will typically be part of factorycalibration or maintenance procedures.

Similar measurements can also be made “in the field” for diagnosticpurposes. Some quantity may then be determined and compared to pre-setlimit values without calculating actual characteristics of the electronbeam. If the diagnostic measurement indicates that the electron beam isout of specification, the system may adjust settings of the electronoptical system until the measured quantity is within limits, oralternatively alert the operator that maintenance is required to achievesystem specifications.

A general introduction will first be given with reference to FIG. 2 ,which is a schematic perspective view of a liquid metal jet X-ray source200 according to some embodiments of the present invention. Theillustrated X-ray source 200 utilizes a liquid metal jet 210 as a targetfor the electron beam. It should be noted that some of the illustratedfeatures of the X-ray source 200 are merely included as possibleexamples and may not necessarily be present in or required for theoperation of all embodiments.

The X-ray source 200 comprises an electron source 214, 246, and a liquidjet generator 208 configured to form the liquid jet 210 that functionsas an electron target. The components of the X-ray source 200 arelocated in a gas-tight housing 242. Some components, however, such as apower supply 244 and a controller 247, can be located outside of thegas-tight housing 242. It is also conceivable that variouselectron-optical components that operate by electromagnetic interactionmay be located outside the housing 242 if the housing does not screenoff electromagnetic fields to any significant extent (e.g. austeniticstainless steel).

The electron source generally comprises a cathode 214 which is poweredby the power supply 244 and includes an electron emitter 246, e.g. athermionic, thermal-field or cold-field charged-particle source.Typically, the electron energy may range from about 5 keV to about 500keV. An electron beam from the electron source is accelerated towards anaccelerating aperture 248, at which point the electron beam enters anelectron-optical system that comprises an arrangement of aligning plates250, lenses 252 and an arrangement of deflection plates 254. Variableproperties of the aligning plates 250, lenses 252, and deflection plates254 can be controlled by signals provided by the controller 247. In theillustrated example, the deflection and alignment plates 250, 254 areoperable to accelerate the electron beam in at least two transversaldirections. After an initial calibration, the aligning plates 250 aretypically maintained at a constant setting throughout a work cycle ofthe X-ray source 200, while the deflection plates 254 are used fordynamically scanning or adjusting an electron spot location during useof the X-ray source 200. Controllable properties of the lenses 252include their respective focusing powers (i.e., focal lengths). AlthoughFIG. 2 symbolically depicts the aligning, focusing and deflecting meansin a way that may suggest that they are of the electrostatic type, theinvention may equally well be embodied using electromagnetic equipmentor a mixture of electrostatic and electromagnetic electron-opticalcomponents. The X-ray source 200 may also comprise stigmator coils 253,which may provide for adjustment of the cross-sectional shape of theelectron spot.

Downstream of the electron-optical system, an outgoing electron beam I₂intersects with the liquid metal jet 210 in an interaction region 212.This is where the X-ray production may take place. X-ray radiation maybe led out from the housing 242 in a direction that does not coincidewith the propagation direction of the electron beam. Any portion of theelectron beam I₂ that continues past the interaction region 212 mayreach an electron beam dump 228 that is electrically connected toground. As shown in the figure, the electron beam dump 228 may belocated a distance D away from the interaction region 212 so that itdoes not interfere with the regular operation of the X-ray source 200.There may also be provided an aperture (not shown in FIG. 2 ) arrangedso that electrons passing through the aperture impinge on the electronbeam dump 228 while electrons not passing through the aperture do not.

FIG. 1 illustrates a method according to the present invention.

A method according to the present invention for characterizing anelectron beam in a liquid metal jet X-ray source comprises the steps ofproviding S110 the electron beam and directing the electron beam to aninteraction region; providing S120 an electron beam dump connected toground potential for receiving the electron beam after it has traversedthe interaction region; scanning S130 the electron beam over at leastpart of the interaction region; measuring S140 X-ray radiation generatedduring the scanning to obtain an X-ray profile; and calculating S150 anelectron beam characteristic based on the X-ray profile.

In a preferred embodiment, the step S140 of measuring X-ray radiationgenerated during the scanning comprises measuring X-ray radiationgenerated by interaction between the electron beam and the electron beamdump. For example, a cross-sectional extension (width) of the electronbeam may be determined by scanning the electron beam over theinteraction region, and thereby over the electron beam dump, and at thesame time measure the X-ray radiation generated. An aperture may beprovided such that X-ray radiation is only generated at the electronbeam dump by any part of the electron beam that passes through theaperture. An aperture may, for example, be provided as illustrated inFIG. 3 , where only those electrons that reach the electron beam dumpsurface 124 contribute to the X-ray radiation detected. By correlatingthe direction of the electron beam (e.g. in terms of the voltage appliedto corresponding deflection plates) to the detected X-ray radiation, anX-ray profile is obtained that can be used to calculate thecross-sectional extension of the electron beam in the scan direction. Byscanning the electron beam in more than one direction across theaperture, the full cross-sectional extension of the electron beam can becalculated.

Alternatively, rather than relying on an aperture that limits the amountof electrons that reach the electron beam dump, an object partlyintersecting the path of the electron beam can be provided. Any objectthat absorbs and/or reflects electrons can be used. In this context, itmay be preferred to use the liquid metal jet target for this purpose.The electron beam is then scanned across the obstructing object, whichfunctions as a kind of inverted aperture in the sense that it preventselectrons from reaching the electron beam dump. When the electron beamimpinges on the electron beam dump unobscured by the object, a maximumamount of X-ray radiation will be generated. As the electron beam isscanned over the object, it will become partly obscured and the amountof generated X-ray radiation at the electron beam dump will decreaseuntil the electron beam is maximally obscured by the object. Again, anX-ray profile is obtained that can be used to calculate thecross-sectional extension of the electron beam.

In other embodiments, the method involves measuring X-ray radiation thatis generated by interaction between the electron beam and the liquidmetal jet target during scanning of the electron beam.

In a liquid metal jet X-ray source as schematically shown in FIGS. 4-6 ,where one or more X-ray detectors are positioned for detecting X-rayradiation generated by interaction between the electron beam and theliquid metal jet, the step S140 of measuring X-ray radiation generatedduring the scan to obtain the X-ray profile thus comprises measuringX-ray radiation generated by interaction between the electron beam andthe liquid metal jet.

The influence of self-absorption of X-ray radiation in the liquid metaljet target can be reduced by using two X-ray detectors 128 a and 128 blocated on either side of the interaction region as schematically shownin FIG. 5 . The step S140 of measuring X-ray radiation generated duringthe scan to obtain an X-ray profile may then include considering thetotal detected X-ray radiation at the two detectors, for example bysumming the outputs from the two detectors. If the two detectors arepositioned symmetrically on either side of the interaction region, thenthe sum of the outputs will compensate for any self-absorption inducedasymmetry in the X-ray profile as recorded by one of the detectorsbecause a correspondingly higher or lower level of X-ray radiation willbe detected at the other detector. If the detectors are notsymmetrically positioned, then suitable weights may be applied to therespective outputs before summing.

The influence of self-absorption of X-ray radiation in the liquid metaljet can be further reduced by measuring generated X-ray radiation fromthe same side that the electron beam impacts the liquid metal jet, asschematically shown in FIG. 6 . In such set-up, there will not be anyself-absorption influencing the generated X-ray radiation between theinteraction region and the X-ray detector. This may be particularlyuseful for alignment purposes, because the detector will “see” where theelectron beam impacts the liquid metal jet. The X-ray detector may beprovided with imaging capabilities, for example by including a CCDarray, and a pin hole may be provided between the CCD array and theinteraction region where the electron beam impacts the liquid metal jetin order to enhance the imaging.

An X-ray detector including, for example, a CCD array and a pin holesimilar to the above can also be useful in the set-up as shown in FIG. 4. The X-ray detector will then “see” the generated X-ray radiation.

Alternatively, some other object capable of generating X-ray radiationupon electron impact may be positioned at the interaction region duringthe characterization, and in such embodiments the liquid metal jet maythus be absent during the characterization.

FIG. 3 shows schematically a liquid metal jet X-ray source 300 accordingto a first embodiment of the present invention. The source 300 comprisesan electron source/cathode 110 that emits electrons towards an anode114. An acceleration potential 112 can be applied between the cathode110 and the anode 114 to accelerate the emitted electrons. Downstreamfrom the anode 114 there is arranged one or more alignment coils 116 foralignment of the electron beam. One or more focusing lenses 118 anddeflection plates 120 are also arranged along the electron beam path, tofocus and direct the electron beam towards an interaction region wherethe electron beam can interact with a liquid metal jet target 122.During normal operation, useful X-ray radiation is generated byinteraction between the electron beam and the liquid metal jet 122 inthe interaction region. The X-ray source 300 also comprises an electronbeam dump 124 upon which electrons that have passed the interactionregion impact. The electron beam dump 124 is electrically connected toground, such that the electrons impacting thereupon are disposed, i.e.dumped.

In the embodiment of FIG. 3 , the electron beam dump 124 is arranged sothat X-ray radiation is generated when electrons impact thereupon. AnX-ray detector 128 is provided to detect X-ray radiation generated fromthe electron beam dump 124. The detector 128 may be arranged such thatit detects only X-ray radiation generated from the electron beam dump(and not radiation generated, for example, from interaction between theelectron beam and the liquid metal jet 122). With such configurations,alignment and focusing procedures can be performed in a similar manneras for a conventional electron beam dump in which the electrical currentthrough the beam dump is measured, for example as discussed inabove-mentioned WO 2012/087238. However, since X-ray radiation generatedfrom the beam dump 124 is used in the procedure rather than theelectrical current through the beam dump, there is no need to maintainthe beam dump 124 at some particular electrical potential. To thecontrary, in embodiments of the present invention the electron beam dump124 is electrically connected to ground, as shown at 126 in FIG. 3 .Therefore, in case a metal droplet, for example, should attach at theedge of the beam dump 124 no detrimental short circuit occurs, and thedeposited metal droplet will also generate X-rays upon electron impact,thus not disabling the functionality.

In some embodiments, the design may be optimized in the sense that thematerial of the electron beam dump 124 provides for similar crosssection for X-ray generation for all relevant orientations of theelectron beam. An embodiment may, for example, comprise a flat surfacearranged at a suitable angle with respect to the impact direction of theelectron beam. In other embodiments, the electron beam dump 124 maycomprise a cylindrical surface where the radius of the cylinder is largecompared to a distance that the electron beam moves across the surfaceduring scanning of the electron beam across an aperture of the electronbeam dump.

Preferably, the electron beam dump is provided with a suitable coolingarrangement in order to handle the thermal load associated with theimpact of the electron beam.

In embodiments of the present invention, the electron beam dump 124 iselectrically connected to ground. Charge build-up at the beam dump 124is thereby effectively prevented, and prior art problems relating toshort circuits between the beam dump and other parts of the arrangementare avoided. It should be noted, however, that the electron beam dump124 may not need to be consistently connected to ground. It isconceivable that the grounding is activated intermittently, for examplewhen a threshold potential at the beam dump has been reached, to dumpthe accumulated charge to ground optionally over a suitable currentlimiting arrangement, e.g. a resistor. The preferred embodiments,however, have the electron beam dump 124 consistently connected toelectrical ground such that the electron beam dump is maintained atground potential. It is conceivable within the scope of the invention tocreate a virtual ground potential for the enclosure and the electronbeam dump, i.e. these components may actively be held at a certainelectrical potential not necessarily equal to zero. Embodiments of thistype may have design advantages in some circumstances, but the generalconcept of the invention is not affected.

Any suitable type of detector may be used for the X-ray detector 128,for example a cadmium telluride (CdTe) diode in a tungsten (W) housing.

In the embodiment shown in FIG. 3 , the X-ray profile during scanning ofthe electron beam is obtained by measuring X-ray radiation generated byinteraction between the electron beam and the electron beam dump 124.Optionally, an object such as the liquid metal jet target 122 can bepresent to partly obscure the electron beam during scanning. The X-raydetector 128 is positioned such that it only detects X-ray radiationfrom the electron beam dump and not any radiation generated frominteraction between the electron beam and the liquid metal jet or anyother part of the system, e.g. the housing or an aperture placed betweenthe interaction region and the electron beam dump.

Other embodiments may also rely on detection of X-ray radiationgenerated by interaction between the electron beam and the liquid metaljet of the source 100 or between the electron beam and a referenceobject placed in the electron beam path. FIG. 4 schematically shows anembodiment of an X-ray source 400 in which the X-ray detector 128 ispositioned to detect X-rays generated in the interaction region. TheX-ray sensor for detecting X-rays generated in the interaction region ispreferably a second sensor, dedicated for this purpose. The X-raydetector 128 may then conveniently be placed outside of a vacuum chamberof the X-ray source and detect X-ray radiation through an X-raytransparent window. A typical X-ray source according to the presentinvention may comprise one or more X-ray transparent windows, or ports,through which generated X-ray radiation is extracted. The detector 128may conveniently be positioned at one such port. The detector 128 willthereby be able to detect X-ray radiation when the electron beam impactson the liquid metal target (or a suitably placed reference object) butwill not detect any X-ray radiation when the electron beam does notimpact on the target. Thereby, by sampling the X-ray detector 128 whilethe electron beam is scanned over the target, an X-ray intensity profilemay be obtained that in turn can be used to deduce characteristics suchas cross section dimensions of the electron beam. It is conceivable thatself-absorption in the target may give rise to measurement of a somewhatskewed profile, but this may be compensated for either by subtracting avarying background or by only using X-ray radiation of such energy thatself-absorption in the target is diminished, for example only detectingX-ray radiation with energies well above the X-ray absorption edges ofthe target material.

FIG. 5 shows schematically another embodiment of a liquid metal jetX-ray source 500 according to the present invention, in whichself-absorption is compensated for by the use of two X-ray detectors 128a, 128 b, each placed at a different angle with respect to the liquidmetal jet 122. A compensated measurement can thus be obtained byconsidering the total detected X-ray radiation at the two detectors.

FIG. 6 schematically shows yet another embodiment, in which the X-raydetector 128 is positioned in line of sight from the interaction regionbut below (or above) the electron beam. As long as the X-ray detectorhas a sufficiently narrow field of view, any radiation generated fromelectrons that impact on the electron beam dump 124 may be preventedfrom being detected by the X-ray detector 128. With such positioning ofthe X-ray detector, artefacts caused by self-absorption in the targetmay be reduced.

As will be understood, the detector placements shown in FIGS. 3-6 mayalso be combined. For example, an X-ray source and/or a correspondingmethod that involves measurement of X-ray radiation generated byinteraction between the electron beam and the electron beam dump, asshown in FIG. 3 , may be combined (i.e. supplemented) with measurementof X-ray radiation generated by interaction between the electron beamand the liquid metal jet or another obscuring object as shown in any ofFIGS. 4-6 . It is also conceivable to have implementations in which theX-ray radiation generated by interaction between the electron beam andthe electron beam dump is not considered when determining the X-rayprofile, thus relying solely on one or more of the detection schemesdescribed with reference to FIGS. 4-6 .

In the various embodiments of the present invention, an X-ray profile isacquired by scanning the electron beam across either the liquid metaljet, a reference object, an aperture, or the like, and the therebyobtained X-ray profile may be used when calibrating or adjusting focusof the electron beam. For aligning the electron beam along the opticalaxis of the system, a second sensor, for example a sensor detectingbackscattered electrons, may be used. The use of such backscattersensor, however, may be of less advantage for a non-flat target sincethe backscatter coefficient will then vary as the electron beam isscanned across the target.

In case a metal droplet would deposit somewhere between the target andthe X-ray detector, a reduction in the amount of X-ray radiationreaching the detector may occur but this would not disable thefunctionality; an X-ray intensity profile may still be obtained that canbe used for determining electron beam width, although at a slightlyreduced intensity.

In case an X-ray detector is used that has sufficient imagingcapability, for example by being provided with a pin hole and/orincluding a CCD array, the extension of the focal spot in a directionsubstantially parallel to the liquid metal jet may be obtained byscanning the electron beam along that direction while detecting theamount of radiation that reaches the detector. The distance that theelectron beam spot has to be moved for the X-ray signal to go from fullsignal to zero, or some other suitably defined limits, would thencorrespond to the beam spot size.

In the embodiments described above, detection of the X-ray radiation isdirect (e.g. by using a diode-based detector). However, detection of theX-ray radiation can also be indirect by first converting the X-rayradiation to radiation having a lower frequency and then detecting thelower-frequency radiation (e.g. using a scintillator and a detector forvisible light). In all embodiments, it is preferred to shield or placethe X-ray detector such that only radiation from the intended source isdetected. As described above, such shielding can be implemented by aCdTe diode placed inside a W casing. In preferred embodiments, the X-raydetector has a CdTe diode placed suitably deep inside a W cylinder toshield from undesired X-ray radiation. Other types of collimators forlimiting the field of view of the X-ray detector are conceivable withinthe scope of the invention.

To summarize, embodiments of the present invention provide a method ofdetermining a characteristic such as cross-sectional extension of theelectron beam. The electron beam is directed to an interaction region.After having passed the interaction region, the electron beam impingeson the electron beam dump and the charge is disposed to electricalground. The electron beam is scanned over at least part of theinteraction region, and X-ray radiation generated during the scanning ismeasured in order to obtain an X-ray profile that associates measuredX-ray radiation with electron beam direction. An electron beamcharacteristic such as the cross-sectional extension thereof is thencalculated based on the generated X-ray profile.

In some embodiments, the X-ray radiation is generated by interactionbetween the electron beam and the beam dump, and the electron beam ispassed through an aperture before reaching the electron beam dump. Onlythose parts of the electron beam that pass through the aperture canreach the electron beam dump and thus contribute to the generation ofX-ray radiation. The X-ray profile can therefore be used to calculate across-sectional extension of the electron beam. It is even conceivablethat the aperture is embodied as the extension of the electron beam dumpitself. In other embodiments, the aperture is embodied as an opening ina wall of the liquid metal jet X-ray source, as schematically shown inthe accompanying drawings. As will be appreciated, in embodiments thatmake use of such aperture, the electron beam needs to be scanned oversufficiently large angles so that the edges of the aperture are reached.

In other embodiments, an object that partly intersects the path of theelectron beam during scanning is provided. Such object can take manydifferent forms as long as it has the property of absorbing and/orreflecting electrons such that fewer electrons reach the electron beamdump when the object partly intersects the path of the electron beam.The object intersecting the path may be the liquid metal jet present inthe interaction region.

While some example embodiments have been described herein, the skilledperson will not be limited to these examples when practicing embodimentsof the invention. On the contrary, many modifications and variations arepossible within the scope of the appended claims. In particular, X-raysources comprising more than one target or more than one electron beamare conceivable within the scope of the present inventive concept.Furthermore, X-ray sources of the type described herein mayadvantageously be combined with X-ray optics and/or detectors tailoredto specific applications exemplified by, but not limited to, medicaldiagnosis, non-destructive testing, lithography, crystal analysis,microscopy, material science, surface physics, protein structuredetermination by X-ray diffraction, X-ray photo spectroscopy (XPS),critical dimension small angle X-ray scattering (CD-SAXS), and X-rayfluorescence. After having read and understood this disclosure inconnection with the accompanying drawings, the skilled person will beable to implement various embodiments.

Embodiments

1. A method for characterizing an electron beam in a liquid metal jetX-ray source, comprising

providing said electron beam and directing said electron beam to aninteraction region;

providing an electron beam dump connected to ground potential forreceiving said electron beam after it has traversed said interactionregion;

scanning said electron beam over at least part of said interactionregion;

measuring X-ray radiation generated by interaction between said electronbeam and said electron beam dump during said scanning to obtain an X-rayprofile; and

calculating an electron beam characteristic based on said X-ray profile.

2. The method of embodiment 1, further comprising

providing an object partly intersecting a path of the electron beamduring said scanning, wherein said object absorbs and/or reflectselectrons.

3. The method of embodiment 2, wherein said object is a liquid metal jetpresent in said interaction region.4. The method of embodiment 3, further comprising calculating acharacteristic of said liquid metal jet based on said X-ray profile.5. The method of any one of embodiments 2-4, wherein the step ofmeasuring X-ray radiation to obtain an X-ray profile further comprisesmeasuring X-ray radiation generated by interaction between said electronbeam and said object.6. The method of any one of embodiments 1-4, further comprising

providing an aperture between said interaction region and said electronbeam dump, said aperture being arranged so that only electrons passingsaid aperture contribute to the X-ray radiation measured during saidscanning.

7. The method of embodiment 6, wherein scanning said electron beam oversaid interaction region comprises scanning said electron beam over saidaperture.8. The method of embodiment 5, further comprising providing a pin holeand wherein measuring a profile of X-ray radiation generated during saidscanning comprises detecting X-ray radiation that has passed throughsaid pin hole.9. A liquid metal jet X-ray source, comprising:

an electron source arranged for providing an electron beam and directingsaid electron beam to an interaction region;

an electron beam dump connected to ground potential, said electron beamdump being arranged for receiving the electron beam after it hastraversed said interaction region;

a scanning arrangement capable of scanning said electron beam over atleast part of said interaction region;

an X-ray sensor positioned and arranged to detect X-ray radiationgenerated by interaction between said electron beam and said electronbeam dump; and

circuitry operatively connected to said scanning arrangement and to saidX-ray sensor, said circuitry being configured to determine an X-rayprofile during scanning of said electron beam.

10. The liquid metal jet X-ray source of embodiment 9, wherein saidcircuitry is further configured to calculate a characteristic of saidelectron beam based on said X-ray profile.11. The liquid metal jet X-ray source of embodiment 9 or 10, furthercomprising a reference object removably provided to partly intersect apath of the electron beam during said scanning, wherein said objectabsorbs and/or reflects electrons.12. The liquid metal jet X-ray source of any one of embodiments 9-11,further comprising a collimator for limiting a field of view of saidX-ray sensor.13. The liquid metal jet X-ray source of any one of embodiments 9-12,further comprising an aperture between said interaction region and saidelectron beam dump, said aperture being arranged so that only electronspassing said aperture contribute to the X-ray radiation measured duringsaid scanning.14. The liquid metal jet X-ray source of any one of embodiments 9-13,further comprising a second X-ray sensor positioned and arranged todetect X-ray radiation generated in the interaction region.15. The liquid metal jet X-ray source of embodiment 14 furthercomprising a pin hole positioned and arranged so that X-ray radiationdetected by said second X-ray sensor pass through said pin hole.

1. A method for characterizing an electron beam in a liquid metal jetX-ray source, comprising providing said electron beam and directing saidelectron beam to an interaction region; providing an electron beam dumpconnected to ground potential for receiving said electron beam after ithas traversed said interaction region; scanning said electron beam overat least part of said interaction region; measuring X-ray radiationgenerated during said scanning to obtain an X-ray profile; andcalculating an electron beam characteristic based on said X-ray profile.2. The method of claim 1, further comprising providing an object partlyintersecting a path of the electron beam during said scanning, whereinsaid object absorbs and/or reflects electrons.
 3. The method of claim 2,wherein said object is a liquid metal jet present in said interactionregion.
 4. The method of claim 3, further comprising calculating acharacteristic of said liquid metal jet based on said X-ray profile. 5.The method of claim 2, wherein the step of measuring X-ray radiation toobtain an X-ray profile further comprises measuring X-ray radiationgenerated by interaction between said electron beam and said object. 6.The method of claim 1, further comprising providing an aperture betweensaid interaction region and said electron beam dump, said aperture beingarranged so that only electrons passing said aperture contribute to theX-ray radiation measured during said scanning.
 7. The method of claim 6,wherein scanning said electron beam over said interaction regioncomprises scanning said electron beam over said aperture.
 8. The methodof claim 5, further comprising providing a pin hole and whereinmeasuring a profile of X-ray radiation generated during said scanningcomprises detecting X-ray radiation that has passed through said pinhole.
 9. A liquid metal jet X-ray source, comprising: an electron sourcearranged for providing an electron beam and directing said electron beamto an interaction region; an electron beam dump connected to groundpotential, said electron beam dump being arranged for receiving theelectron beam after it has traversed said interaction region; a scanningarrangement capable of scanning said electron beam over at least part ofsaid interaction region; an X-ray sensor positioned and arranged todetect X-ray radiation generated during said scanning; and circuitryoperatively connected to said scanning arrangement and to said X-raysensor, said circuitry being configured to determine an X-ray profileduring scanning of said electron beam.
 10. The liquid metal jet X-raysource of claim 9, wherein said circuitry is further configured tocalculate a characteristic of said electron beam based on said X-rayprofile.
 11. The liquid metal jet X-ray source of claim 9, furthercomprising a reference object removably provided to partly intersect apath of the electron beam during said scanning, wherein said objectabsorbs and/or reflects electrons.
 12. The liquid metal jet X-ray sourceof claim 9, further comprising a collimator for limiting a field of viewof said X-ray sensor.
 13. The liquid metal jet X-ray source of claim 9,further comprising an aperture between said interaction region and saidelectron beam dump, said aperture being arranged so that only electronspassing said aperture contribute to the X-ray radiation measured duringsaid scanning.
 14. The liquid metal jet X-ray source of claim 9, furthercomprising a second X-ray sensor positioned and arranged to detect X-rayradiation generated in the interaction region.
 15. The liquid metal jetX-ray source of claim 14 further comprising a pin hole positioned andarranged so that X-ray radiation detected by said second X-ray sensorpass through said pin hole.